posted 27 Jul 2015, 05:08 by info admin
David M. A. Mackenzie*, Jonas D. Buron, Patrick
R Whelan, Bjarke S. Jessen, Adnan Silajdzic, Amaia Pesquera, Alba Centeno,
Amaia Zurutuza, Peter Bøggild, Dirch H. PetersenDepartment of Micro & Nanotechnology,
Technical University of Denmark,
Building 345E, 2800 Kgs. Lyngby, Denmark
As graphene is up-scaled to
wafer-sized production, it is important to have a robust, fast and accurate
method for routine characterization of the electrical properties on large
scale. Here we consider a fabrication procedure involving wafer-scale laser fabrication
of graphene devices to serve this purpose. The inherent advantages of this
method include the high speed of device fabrication and the prevention of
degradation of the electrical properties associated with traditional
lithographic methods: i.e. avoiding
contact to polymers/liquids, known to adversely affect the electrical
properties [1].
Commercially purchased CVD
graphene (covering a 4-inch Si wafer on SiO2) has metal electrodes
(Ti/Au) deposited using electron-beam evaporation through a stencil shadow
mask. The graphene is then patterned via ablation (see Figure 1) with a pulsed
laser to define large devices (Hall bars or van der Pauw geometries), enabling
the large-scale electrical properties to be tested.
Optical microscopy and Raman Spectroscopy were
used to assess ablation of the graphene, as well as stylus profilometery
indicating no damage of the SiO2 substrate. CVD graphene devices
were electrically characterized and showed comparable field-effect mobility,
doping level, on-off ratio, and conductance minimum before and after laser
ablation fabrication.
[1] A. M. Goossens, V. E. Calado, A. Barreiro, K.
Watanabe, T. Taniguchi, L. M. K. Vandersypen, Appl. Phys. Lett. 100, 073110
(2012)
David Mackenzie is a postdoctoral researcher in the Nanocarbon group
based at the Department
of Micro & Nanotechnology, Technical University of Denmark. Research
interests include fabricating graphene devices, electrical and gas sensing
measurements.
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