Carbon nanotubes and graphene possess unique physical and electronic properties which make them promising materials for many different applications. However, the diversity of applications means that material produced need to have different morphologies and properties depending on the particular property being exploited. This presentation looks at this from an equipment manufacturer’s perspective and goal in enabling controlled deposition technology. The fundamental growth mechanisms are discussed and how these are then translated into hardware for various on-substrate applications are shown. Challenges and results for scaling will also be presented.

Dr Ken Teo is the Director of Nanoinstruments at AIXTRON (www.aixtron.com), a world leading provider of deposition equipment for semiconductor materials to R&D and Industry. His previous roles include Lecturer in Electrical Engineering at the University of Cambridge, Director of Studies and Fellow of Christ’s College Cambridge, and project and development engineering positions at Defence Materiel Organisation and PDL Holdings. He is Fellow of the Institute of Nanotechnology and has been awarded the IEE prize in Electrical Engineering, IEEE Centennial prize, Million Dollar Project Award by the International Exposition of Quality Circles, the Outstanding Work Improvement Team Leader Award by the Productivity Standards Board, and the MRS Grad Gold Award. He is the author/co-author ~150 papers and 6 patents. His interests and achievements are in the controlled deposition of carbon nanotubes and grapheme for electronic devices.